Sensirion SLF3S Liquid Flow Sensors with Manifold Mount

Sensirion SLF3S Liquid Flow Sensors with Manifold Mount are compact liquid flow sensors for high-volume applications, offering accurate bidirectional flow measurement. These devices feature a downmount design for easy manifold integration and a digital I2C interface via a 6-pin connector. Built on Sensirion’s CMOSens technology, the sensors integrate sensing, signal processing, and calibration on a single chip, enabling high performance, reliability, and efficient mass production, ideal for demanding OEM applications.

The Sensirion SLF3S-0600D delivers a ±2ml/min H2O flow rate, while the SLF3S-1300D has a ±40ml/min H2O flow rate. Both sensors come fully calibrated for water (H2O) and Isopropyl Alcohol (IPA).

Features

  • Downmount mounting for manifold integration
  • Flow sensing up to ±2ml/min or ±40ml/min
  • Calibrated for H2O and IPA
  • Temperature compensated
  • Turn down ratio beyond 200:1
  • Response time below 20ms

Applications

  • Diagnostics
  • Life science and analytical instruments
  • Biomedical devices
  • Fuel cell systems
  • Industrial automation

Specifications

  • Liquid flow
    • Full-scale flow rate (H2O)
      • SLF3S-1300D - 40ml/min
      • SLF3S-0600D - 2ml/min
    • 5% accuracy (H2O)
    • 0.5% repeatability (H2O)
    • Full-scale flow rate (IPA)
      • SLF3S-1300D - 40ml/min
      • SLF3S-0600D - 2ml/min
    • 10% accuracy (IPA)
    • 0.5% repeatability (IPA)
    • 12bar maximum operating pressure
    • Downmount fluidic connector ports
  • Generic
    • 3.2V to 3.8V supply voltage
    • 6mA max. supply current
    • I2C and RS485 interfaces
    • 15mm x 30mm x 6.5mm size (LxWxH)

SLF3S-0600D Dimensions (mm)

Mechanical Drawing - Sensirion SLF3S Liquid Flow Sensors with Manifold Mount

SLF3S-1300D Dimensions (mm)

Mechanical Drawing - Sensirion SLF3S Liquid Flow Sensors with Manifold Mount
Published: 2026-10-09 | Updated: 2026-10-15