Sensirion SLF3S Liquid Flow Sensors with Manifold Mount
Sensirion SLF3S Liquid Flow Sensors with Manifold Mount are compact liquid flow sensors for high-volume applications, offering accurate bidirectional flow measurement. These devices feature a downmount design for easy manifold integration and a digital I2C interface via a 6-pin connector. Built on Sensirion’s CMOSens technology, the sensors integrate sensing, signal processing, and calibration on a single chip, enabling high performance, reliability, and efficient mass production, ideal for demanding OEM applications.
The Sensirion SLF3S-0600D delivers a ±2ml/min H2O flow rate, while the SLF3S-1300D has a ±40ml/min H2O flow rate. Both sensors come fully calibrated for water (H2O) and Isopropyl Alcohol (IPA).
Features
- Downmount mounting for manifold integration
- Flow sensing up to ±2ml/min or ±40ml/min
- Calibrated for H2O and IPA
- Temperature compensated
- Turn down ratio beyond 200:1
- Response time below 20ms
Applications
- Diagnostics
- Life science and analytical instruments
- Biomedical devices
- Fuel cell systems
- Industrial automation
Specifications
- Liquid flow
- Full-scale flow rate (H2O)
- SLF3S-1300D - 40ml/min
- SLF3S-0600D - 2ml/min
- 5% accuracy (H2O)
- 0.5% repeatability (H2O)
- Full-scale flow rate (IPA)
- SLF3S-1300D - 40ml/min
- SLF3S-0600D - 2ml/min
- 10% accuracy (IPA)
- 0.5% repeatability (IPA)
- 12bar maximum operating pressure
- Downmount fluidic connector ports
- Full-scale flow rate (H2O)
- Generic
- 3.2V to 3.8V supply voltage
- 6mA max. supply current
- I2C and RS485 interfaces
- 15mm x 30mm x 6.5mm size (LxWxH)
Additional Resources
- SLF3S-xxxxD Datasheet
- Product Flyer SLF3x
- Application Note: Auto Heater Management SLF3x
- Application Note: Chemical Resistance
- Application Note: Engineering Guidelines of the SLF3x Series
- Application Note: Formation, Prevention, and Removal of Biofilms
- Application Note: I2C Address Change SLF3x
- Application Note: Operating Guidelines for Liquid Flow Meter Kits (SLF3x and LD20)
- Application Note: Selection Guide Liquid Flow Sensors
- Application Note: Thermal Conductivity Measurement SLF3x
- Software: SEK-ControlCenter
SLF3S-0600D Dimensions (mm)
SLF3S-1300D Dimensions (mm)
Published: 2026-10-09
| Updated: 2026-10-15
